Numerical Investigation on Mechanisms of Particle Generation in He/CF4 Pulsed Dielectric Barrier Discharge Plasma at Atmospheric Pressure

In this work, a numerical investigation on the mechanism of the generation of active particles in the atmospheric pressure helium/carbon tetrafluoride (He/CF4) plasma has been performed based on a typical pulsed dielectric barrier discharge (DBD) and a 1-D fluid model. The present work gives the results in the following. In He/CF4 mixture, electron collision reaction plays an important role in the production of active particles. The reaction pathways of the generation of particles change during one pulse cycle, and the change of electron energy caused by the evolution of electric field with time has an effect on the key reaction pathway. The concentration of CF4 has a significant effect on the contributions of the reactions producing F and CF
$_{2}^{+}$
.