Development of Metrological-grade Spinning Rotor Gauge

The spinning rotor gauge is an internationally recognized high vacuum transfer standard. It is widely used in aerospace, nuclear industry, semiconductor and other fields because of its excellent metrological characteristics and chemical inertness. In order to realize the international equivalence of vacuum quantity in China's science and technology industry. Through the continuous research of key technologies, such as high-quality suspension based on permanent magnet, accurate measurement of axial displacement, residual drag suppression, construction of kinetic model of rotational speed decay rate and high precision detection, the metrological-grade spinning rotor vacuum gauge has been developed. The change of residual drag is less than 0.49 % after 50 minutes of start-up. There is good consistency and linearity in the range of 9 × 10
^-5
Pa to 1 Pa.