Uniformity detection of covering layers for workpieces with Near-field microwave microscopy

The surface of workpieces has various covering layers, such as film packaging in the chip field and electroplating nickel gold in the hardware surface treatment process. It is necessary to detect the uniformity of the surface covering layer of workpieces, because the uniformity of the surface covering layer will directly affect the performance of the workpiece. We propose a method to detect covering layer uniformity using near field scanning microwave microscopy. By analyzing the dispersion of parameters such as resonant frequency and quality factor of near-field scanning microwave system, the uniformity of the sample covering can be achieved effectively without contacting the surface of workpieces.