Uniform Electron Emission from $\text{SiO}_{\mathrm{X}}$ Tunneling Diode Arrays under Rough Vacuum

Uniform electron emission (EE) under rough vacuum of
$\sim 10^{-2}$
Pa from on-chip micro-emitter arrays based on
$\text{SiO}_{\mathrm{x}}$
tunneling diodes (STDs) in electroformed
$\text{SiO}_{\mathrm{x}}$
is reported. Here, we provide a unique means to visually resolve the spatial distribution of EE from STD arrays and emitter-to-emitter uniformity at the microscale resolution via accompanied light emission. Benefiting from good emitter-to-emitter uniformity and low pressure sensitivity of EE from STD arrays, improved emission performances is obtained.