Design of a Tunable Impedance Matching Network Based on MEMS Cantilever Switches

This paper presents the design and fabrication of a cantilever MEMS switch for reconfigurable RF applications. The switch can be used in applications with variable antenna impedance or center frequency determination structure to adjust the impedance matching. Also, this paper offers a tunable Impedance Matching Network (TIMN) for 2.6GHz and 3.5GHz frequencies using cantilever MEMS switches. The proposed structure uses minimum number of switches compared to similar works. S(11) is less than -10dB in the frequency range of 2.23GHz to 3.29GHz and 3GHz to 4.41GHz. Electrical and mechanical simulations are performed in Advanced Design System (ADS) and COMSOL simulation software, respectively. Simulation results indicate the proposed structure can adjust different frequencies for TIMN using MEMS cantilever switches.