Study of MEMS DETF Resonator for Performance Evaluation Based on the Impact of TED

A resonator is a key sensitive element in the micro-electro-mechanical system (MEMS) resonant sensors. The resonator which is the object of study in this paper is a variant of basic Double Ended Tuning Fork (DETF) resonator design. A DETF resonator operates best in 180° phase shift vibration mode. The study focuses on the geometric analysis of the proposed resonator to evaluate its performance in the presence of thermoelastic damping (TED). The impact of a certain geometric modification on quality factor, resonant frequency and damping is analyzed using FEA tool COMSOL. The proposed resonator design exhibits a resonant frequency of 2.08 MHz and a quality factor of 19228. The design has an advantage of enhanced performance with least stress, high resonant frequency, good quality factor and simple geometry.