Deploying an integrated framework of fab-wide and toolset schedulers to improve performance in a real large-scale fab

This work presents the deployment of a novel framework for fab-wide and toolset schedulers (FWS, TS) for scheduling large semiconductor manufacturing plants. We designed a hierarchical structure to enable a fab-wide look-ahead guidance to parallel local toolset schedulers. The presented approach provides a better strategic management of factory assets and, deployed at Seagate Springtown, showed substantial cycle time improvements when compared to dispatch rules based methods.