71 kHz Frequency Modulated PiezoMEMS Gyroscope

This paper reports a frequency modulated (FM) piezoelectric MEMS (piezoMEMS) gyroscope. The gyroscope uses aluminum nitride for both actuation and sensing enabling low motional impedance and thus low voltage actuation without a need for large DC bias voltage. The two orthogonally resonating axis are operated at their respective natural frequencies, from which the rotation rate is sensed by a Lissajous frequency demodulation. Gyroscope controller is implemented with a field programmable gate array (FPGA) to demonstrate a full functioning piezoMEMS FM gyroscope.