A Force-Balance Capacitive MEMS Gravimeter with Superior Response Time, Self-Noise and Drift

This paper reports a MEMS gravimeter with a capacitive displacement transducer and a force-balance system for superior response time, self-noise and drift compared to the state-of-the-art. It thus enables, for the first time, the measurements of low-frequency earth tide and high-frequency seismic motion simultaneously. More importantly, MEMS gravimeters with optimized dynamic response are crucial for a further wide field of applications, such as mobile gravity measurements.