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Masayoshi Nishita - IEEE Xplore Author Profile

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Author details

Masayoshi Nishita

Also published under: M. Nishita

Publications

5

Citations

13

Publications by Year

20052022

Co-Authors:

Hiroshi AbeMaiko ArigaJunichi HasegawaYasutaka HigaYusuke Inaba

Show All Co-Authors (36)

Masayoshi Nishita

Also published under: M. Nishita

Affiliation

Communications Solutions Division

Publication Topics

Tunable Laser,
Ring Resonator,
Tuning Range,
Distributed Feedback,
Excessive Loss,
Fabrication Tolerance,
Ground Electrode,
High Bandwidth,
Incoming Signals,
Insertion Loss,
Laser Mode,
Light Signal

Biography

Masayoshi Nishita was born in Ishikawa, Japan, in 1977. He received the B.S. and M.S. degrees in material physics in engineering science, Osaka University, Osaka, Japan, in 2000 and 2002, respectively.,In 2002, he joined The Furukawa Electric Company, Ltd., Yokohama, Japan, where he was engaged in research and development of reliability of 1550-nm distributed-feedback tunable laser modules. Currently, he has been engaged in the research and development of reliability of widely tunable laser sources.(Based on document published on 11 April 2005).

Publications

5

Citations

13

Publications by Year

20052022

Co-Authors:

Hiroshi Abe
Maiko Ariga
Junichi Hasegawa
Yasutaka Higa
Yusuke Inaba

Show All Co-Authors (36)

Author's Published Works

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Showing 1-25 of 246 results

Conferences (172)

Journals (74)

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Single Year
Thomas W. Kenny(137)
T.W. Kenny(70)
Yunhan Chen(48)
Ian B. Flader(41)
Yushi Yang(37)
Department of Mechanical Engineering, Stanford University, Stanford, CA, USA(30)
Department of Mechanical Engineering, University of Stanford, Stanford, CA, USA(28)
Stanford University, Stanford, CA, USA(21)
University of Stanford, Stanford, CA, USA(17)
Stanford University, Stanford, California, USA(17)
Journal of Microelectromechanical Systems(66)
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)(8)
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)(8)
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)(7)
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)(7)
IEEE(246)
Media(1)
Las Vegas, NV, USA(9)
San Francisco, CA, USA(9)
Barcelona, Spain(8)
Kaohsiung, Taiwan(8)
Anchorage, AK, USA(7)
Resonance Frequency(123)
Quality Factor(88)
Silicon Crystal(70)
Young’s Modulus(45)
polySia(44)

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Results

Fully Differential Gyrator Using a Dynamically Biased 20 MHZ Lamé Mode Resonator

Jintark Kim;Rakibul Islam;James M.L. Miller;Jianing Zhao;Gabrielle Vukasin;Ryan Kwon;Saurabh Saxena;Pavan K. Hanumolu;Thomas W. Kenny;Gaurav Bahl

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2024 | Conference Paper |

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We demonstrate the first MEMS-only differential gyrator using a single Lamé mode electrostatic resonator. A gyrator is a two-port device that produces a pure non-reciprocal phase response and is considered a universal element from which isolators and circulators can be derived. We demonstrate in this work that gyration can be achieved using any electrostatic resonator, through very simple time-mod...Show More

Fully Differential Gyrator Using a Dynamically Biased 20 MHZ Lamé Mode Resonator

Jintark Kim;Rakibul Islam;James M.L. Miller;Jianing Zhao;Gabrielle Vukasin;Ryan Kwon;Saurabh Saxena;Pavan K. Hanumolu;Thomas W. Kenny;Gaurav Bahl

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2024 | Conference Paper |

Influence of Clamping Loss and Electrical Damping On Nonlinear Dissipation in Micromechanical Resonators

James M.L. Miller;Anne L. Alter;Nicholas E. Bousse;Yunhan Chen;Ian B. Flader;Dongsuk D. Shin;Thomas W. Kenny;Steven W. Shaw

2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

Year: 2022 | Conference Paper |

Cited by: Papers (2)

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We study the influence of clamping loss, electrical damping, and transduction nonlinearity on the measured nonlinear dissipation in encapsulated microme-chanical wheel resonators. Our measurements suggest that nonlinear dissipation may arise from the same phonon scattering origins as thermoelastic dissipation in flexural mode resonators ranging in size from carbon nanotubes to guitar strings. Thes...Show More

Influence of Clamping Loss and Electrical Damping On Nonlinear Dissipation in Micromechanical Resonators

James M.L. Miller;Anne L. Alter;Nicholas E. Bousse;Yunhan Chen;Ian B. Flader;Dongsuk D. Shin;Thomas W. Kenny;Steven W. Shaw

2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

Year: 2022 | Conference Paper |

Tuning Frequency Stability in Micromechanical Resonators with Parametric Pumping

Nicholas E. Bousse;James M.L. Miller;Gabrielle D. Vukasin;Hyun-Keun Kwon;Steven W. Shaw;Thomas W. Kenny

2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

Year: 2022 | Conference Paper |

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In this work we experimentally investigate the influence of parametric amplification and parametric suppression on the frequency stability of micromechanical resonators. We isolate the influence of phase slope tuning from changes in the vibrational amplitude and find that parametric suppression improves the frequency stability in the thermal noise regime by over threefold, while parametric amplifi...Show More

Tuning Frequency Stability in Micromechanical Resonators with Parametric Pumping

Nicholas E. Bousse;James M.L. Miller;Gabrielle D. Vukasin;Hyun-Keun Kwon;Steven W. Shaw;Thomas W. Kenny

2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

Year: 2022 | Conference Paper |

Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators

James M. L. Miller;Gabrielle D. Vukasin;Ze Zhang;Hyun-Keun Kwon;Arun Majumdar;Thomas W. Kenny;Steven W. Shaw

Journal of Microelectromechanical Systems

Year: 2022 | Volume: 31, Issue: 2 | Journal Article |

Cited by: Papers (2)

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Clamping loss in micromechanical resonators can strongly depend on the boundary conditions far away from the actual vibrating structure because the acoustic wavelength greatly exceeds the device dimensions. We demonstrate a scheme for post-fabrication tuning of the clamping loss in flexural-mode and bulk-mode resonators by modifying the boundary conditions of the chip with the frame. The measured ...Show More

Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators

James M. L. Miller;Gabrielle D. Vukasin;Ze Zhang;Hyun-Keun Kwon;Arun Majumdar;Thomas W. Kenny;Steven W. Shaw

Journal of Microelectromechanical Systems

Year: 2022 | Volume: 31, Issue: 2 | Journal Article |

A Novel Spring Disk Resonator Gyroscope for Maximizing Q/F

Christopher P. Cameron;Dustin Gerrard;Janna Rodriguez;Yushi Yang;Eldwin Ng;Thomas W. Kenny

2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

Year: 2021 | Conference Paper |

Cited by: Papers (3)

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This paper presents a novel spring disk resonator gyroscope (SRG). The SRG consists of coupled concentric serpentine spring-like rings to reduce mode stiffness while maintaining a device footprint the same as that of existing standard DRGs: 600um in diameter. The Q is increased by a factor of 2.5, and the ring down-time of 934ms is 4 times longer than that of a standard DRG.Show More

A Novel Spring Disk Resonator Gyroscope for Maximizing Q/F

Christopher P. Cameron;Dustin Gerrard;Janna Rodriguez;Yushi Yang;Eldwin Ng;Thomas W. Kenny

2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

Year: 2021 | Conference Paper |

Quantification of Energy Dissipation Mechanisms in Toroidal Ring Gyroscope

Yusheng Wang;Yu-Wei Lin;Janna Glaze;Gabrielle Davis Vukasin;Dongsuk D. Shin;Hyun-Keun Kwon;David B. Heinz;Yunhan Chen;Dustin D. Gerrard;Thomas W. Kenny;Andrei M. Shkel

Journal of Microelectromechanical Systems

Year: 2021 | Volume: 30, Issue: 2 | Journal Article |

Cited by: Papers (22)

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We present a study on the quantification of energy dissipation of Micro-Electro-Mechanical System (MEMS) resonators. Toroidal Ring Gyroscope (TRG) was used as a platform to conduct the study. The main energy dissipation mechanisms in TRG include viscous air damping, Thermo-Elastic Damping (TED), anchor loss, and surface loss. During our experimental study, these energy dissipation mechanisms were ...Show More

Quantification of Energy Dissipation Mechanisms in Toroidal Ring Gyroscope

Yusheng Wang;Yu-Wei Lin;Janna Glaze;Gabrielle Davis Vukasin;Dongsuk D. Shin;Hyun-Keun Kwon;David B. Heinz;Yunhan Chen;Dustin D. Gerrard;Thomas W. Kenny;Andrei M. Shkel

Journal of Microelectromechanical Systems

Year: 2021 | Volume: 30, Issue: 2 | Journal Article |

Numerical Modelling of Non-Linearities in MEMS Resonators

Valentina Zega;Gabriele Gattere;Saisneha Koppaka;Anne Alter;Gabrielle D. Vukasin;Attilio Frangi;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 6 | Journal Article |

Cited by: Papers (20)

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Numerical modelling of MicroElectroMechanical Systems (MEMS) resonators is still attracting increasing interest from the sensors community especially when the nonlinear regime is activated. Here, the dynamic response of two different types of double-ended tuning fork MEMS resonators is studied both in the linear and nonlinear regimes. A one Degree Of Freedom (1 dof) model able to predict the frequ...Show More

Numerical Modelling of Non-Linearities in MEMS Resonators

Valentina Zega;Gabriele Gattere;Saisneha Koppaka;Anne Alter;Gabrielle D. Vukasin;Attilio Frangi;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 6 | Journal Article |

Characterization of Accelerated Fatigue in Thick Epi-Polysilicon Vacuum Encapsulated MEMS Resonators

Anne L. Alter;Ian B. Flader;Yunhan Chen;Lizmarie Comenencia Ortiz;Dongsuk D. Shin;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 6 | Journal Article |

Cited by: Papers (3)

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Fatigue in thick (> 20 μm), epitaxially deposited polysilicon MEMS is characterized from 25°C and up to 250°C in an environment free of oxygen and humidity. This work is the first to report fatigue initiated in the native epi-polysilicon, free from any contributions due to oxide or environmental conditions. Fatigue was most prominent above stresses of 1.5 GPa at all temperatures. Resonant frequenc...Show More

Characterization of Accelerated Fatigue in Thick Epi-Polysilicon Vacuum Encapsulated MEMS Resonators

Anne L. Alter;Ian B. Flader;Yunhan Chen;Lizmarie Comenencia Ortiz;Dongsuk D. Shin;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 6 | Journal Article |

Limits to Thermal-Piezoresistive Cooling in Silicon Micromechanical Resonators

James M. L. Miller;Haoshen Zhu;Subramanian Sundaram;Gabrielle D. Vukasin;Yunhan Chen;Ian B. Flader;Dongsuk D. Shin;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 5 | Journal Article |

Cited by: Papers (5)

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We study thermal-piezoresistive cooling in silicon micromechanical resonators at large currents and high temperatures. Crossing a thermal transition region corresponds to a steep reduction in resonance frequency, an abrupt plateauing in the effective quality factor, and a large increase in thermomechanical fluctuations. Comparing measurements with simulations suggests that the second-order tempera...Show More

Limits to Thermal-Piezoresistive Cooling in Silicon Micromechanical Resonators

James M. L. Miller;Haoshen Zhu;Subramanian Sundaram;Gabrielle D. Vukasin;Yunhan Chen;Ian B. Flader;Dongsuk D. Shin;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 5 | Journal Article |

Crystal Orientation Dependent Dual Frequency Ovenized MEMS Resonator With Temperature Stability and Shock Robustness

Hyun-Keun Kwon;Gabrielle D. Vukasin;Nicholas E. Bousse;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 5 | Journal Article |

Cited by: Papers (8)

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In this paper, we demonstrate a dual frequency oven-controlled MEMS resonator that can be designed to have an output frequency of 1.27 Mhz or 13 Mhz depending on the crystal orientation of the device. Both modes operate based on closed-loop thermal compensation that can offer PPB (parts-per-billion) level temperature stability over a wide temperature range using low power and exhibit strong shock ...Show More

Crystal Orientation Dependent Dual Frequency Ovenized MEMS Resonator With Temperature Stability and Shock Robustness

Hyun-Keun Kwon;Gabrielle D. Vukasin;Nicholas E. Bousse;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 5 | Journal Article |

Anchor Design Affects Dominant Energy Loss Mechanism in a Lamé Mode MEM Resonator

Gabrielle D. Vukasin;Veronica K. Sanchez;Janna Glaze;Nicholas E. Bousse;Nathan Bissel;Dongsuk D. Shin;Hyun-Keun Kwon;David Heinz;Ernest T.-T. Yen;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 5 | Journal Article |

Cited by: Papers (7)

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We present a Lamé mode resonator whose limiting damping mechanism depends on its anchor geometry. The device is anchor-limited when the anchors are stiffer and is Akhiezer-limited with more compliant anchors. This result is determined by observing the temperature dependence of the quality factor (Q) for devices with different lateral dimensions and different anchor designs. The total measured Q in...Show More

Anchor Design Affects Dominant Energy Loss Mechanism in a Lamé Mode MEM Resonator

Gabrielle D. Vukasin;Veronica K. Sanchez;Janna Glaze;Nicholas E. Bousse;Nathan Bissel;Dongsuk D. Shin;Hyun-Keun Kwon;David Heinz;Ernest T.-T. Yen;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 5 | Journal Article |

Nonlinear Dissipation in Epitaxial SCS and Polysilicon MEMS Driven at Large Amplitudes

Anne L. Alter;Ian B. Flader;Yunhan Chen;Dongsuk D. Shin;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 5 | Journal Article |

Cited by: Papers (6)

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In this paper, we observe amplitude-dependent nonlinear dissipation in experimental measurements of the quality factor (Q). The ringdown response is used to quantify the magnitude of the amplitude-dependent effect in both polysilicon and single crystal silicon (SCS). The Q is reduced in both materials, up to 15.6%, and has a stronger influence on the measurements of Q in polysilicon than in SCS. S...Show More

Nonlinear Dissipation in Epitaxial SCS and Polysilicon MEMS Driven at Large Amplitudes

Anne L. Alter;Ian B. Flader;Yunhan Chen;Dongsuk D. Shin;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 5 | Journal Article |

Negative Nonlinear Dissipation in Microelectromechanical Beams

Nicholas Eric Bousse;James Marion Lehto Miller;Anne Louise Alter;Christopher Patrick Cameron;Hyun-Keun Kwon;Gabrielle Davis Vukasin;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 5 | Journal Article |

Cited by: Papers (7)

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In this work we present measurements of drive-induced negative nonlinear dissipation present in doubly clamped microbeams fabricated in a hermetically sealed package. We characterize the amplitude-frequency nonlinearity and nonlinear dissipation present in this system under direct drive. The negative nature of the nonlinear dissipation is observed when measuring either the directly- or parametrica...Show More

Negative Nonlinear Dissipation in Microelectromechanical Beams

Nicholas Eric Bousse;James Marion Lehto Miller;Anne Louise Alter;Christopher Patrick Cameron;Hyun-Keun Kwon;Gabrielle Davis Vukasin;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 5 | Journal Article |

Quality Factor Extraction and Enhancement Across Temperature in Ring Resonators

Anne L. Alter;Dustin D. Gerrard;Hyun-Keun Kwon;Gabrielle D. Vukasin;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 5 | Journal Article |

Cited by: Papers (6)

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This work demonstrates that thin slots strategically placed in MEMS ring resonators are able to enhance the quality factor (Q) of the device operated in a wineglass mode in the isothermal region. The devices are optimized using COMSOL for an increased Q through increased slot size, using the Zener curve as a comparative baseline. These parts are fabricated and encapsulated in an ultra-clean enviro...Show More

Quality Factor Extraction and Enhancement Across Temperature in Ring Resonators

Anne L. Alter;Dustin D. Gerrard;Hyun-Keun Kwon;Gabrielle D. Vukasin;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 5 | Journal Article |

Design Comparison and Survivability of Epitaxially Encapsulated MEMS Disc Resonating Gyroscopes at High Shock (>27,000g)

Christopher P. Cameron;Taryn Imamura;Chinmay Devmalya;Gabrielle Vukasin;Anne Alter;Thomas Kenny

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

Year: 2020 | Conference Paper |

Cited by: Papers (1)

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In this work, we compared the survivability of epitaxially encapsulated (EPI) MEMS disc resonating gyroscopes (DRGs) with ten different designs up to shocks near 50,000g. Though most DRGs survived, there are clear differences in the performance of devices post shock. Devices are clustered into their respective shock groups, but some devices maintain their superior performance even in the face of e...Show More

Design Comparison and Survivability of Epitaxially Encapsulated MEMS Disc Resonating Gyroscopes at High Shock (>27,000g)

Christopher P. Cameron;Taryn Imamura;Chinmay Devmalya;Gabrielle Vukasin;Anne Alter;Thomas Kenny

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

Year: 2020 | Conference Paper |

Thermal Accelerometer Performance Enhancements through AC Biasing Schemes

Kirsten E. Kaplan;Martin M. Winterkorn;Hyo Jin K. Kim;Camille L. M. Everhart;Fritz B. Prinz;Thomas W. Kenny

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

Year: 2020 | Conference Paper |

Cited by: Papers (1)

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MEMS Thermal accelerometers are typically driven and sensed entirely at DC, an approach that contributes to their relatively high drift and noise. This work presents several novel operation modes based on independent modulation of the heater and the detectors: DC heating and AC sensing, AC heating and DC sensing, and full AC. The improvement in noise density offered by modulating the detectors is ...Show More

Thermal Accelerometer Performance Enhancements through AC Biasing Schemes

Kirsten E. Kaplan;Martin M. Winterkorn;Hyo Jin K. Kim;Camille L. M. Everhart;Fritz B. Prinz;Thomas W. Kenny

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

Year: 2020 | Conference Paper |

Temperature Hysteresis in Piezoresistive Microcantilevers

James M.L. Miller;Ze Zhang;Nicholas E. Bousse;Dusan Coso;Seid Sadat;Hyun-Keun Kwon;Gabrielle D. Vukasin;Arun Majumdar;Thomas W. Kenny

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2020 | Conference Paper |

Cited by: Papers (3)

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We observe significant temperature hysteresis in the resonant frequency and quality factor of silicon piezoresistive microcantilevers from room temperature down to 40 K. The hysteresis becomes increasingly pronounced as the support beam length is reduced from 100 μm to 30 μm, leading to over a twenty-fold difference in Q values between the temperature sweep downwards and upwards for the 30 μm supp...Show More

Temperature Hysteresis in Piezoresistive Microcantilevers

James M.L. Miller;Ze Zhang;Nicholas E. Bousse;Dusan Coso;Seid Sadat;Hyun-Keun Kwon;Gabrielle D. Vukasin;Arun Majumdar;Thomas W. Kenny

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2020 | Conference Paper |

Frequency Stabilization in an Encapsulated High-Q Micromechanical Resonator via Internal Resonance

Jun Yu;Hyun-Keun Kwon;Gabrielle D. Vukasin;Thomas W. Kenny;Hanna Cho

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2020 | Conference Paper |

Cited by: Papers (4)

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The frequency stability is a key parameter to determine the performance of a micro-electro-mechanical (MEM) resonator. In this study, we utilized the mechanism of 1:2 internal resonance (IR) in a hermetically encapsulated beam resonator with a high Q-factor (>4000) to improve the frequency stability. When a MEM resonator is driven by a single-frequency actuation and conditions for IR are satisfied...Show More

Frequency Stabilization in an Encapsulated High-Q Micromechanical Resonator via Internal Resonance

Jun Yu;Hyun-Keun Kwon;Gabrielle D. Vukasin;Thomas W. Kenny;Hanna Cho

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2020 | Conference Paper |

Nonlinear Modal Interactions and Internal Resonance in a Micromachined Disk Resonator

Jiangkun Sun;Hemin Zhang;Dongyang Chen;Milind Pandit;Guillermo Sobreviela;Dingbang Xiao;Ming Zhuo;Dustin D. Gerrard;Ryan Kwon;Gabrielle Vukasin;Thomas W. Kenny;Ashwin Seshia

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2020 | Conference Paper |

Cited by: Papers (3)

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In this paper, nonlinear modal interactions in a micromachined disk resonator with 2:1 internal resonance are demonstrated. By means of the multiple scales method, two types of transition from stable to unstable behavior including jump phenomena and modulated motion corresponding to M-shaped responses are explained in a coupled nonlinear system dominated by quadratic nonlinearity. At the same time...Show More

Nonlinear Modal Interactions and Internal Resonance in a Micromachined Disk Resonator

Jiangkun Sun;Hemin Zhang;Dongyang Chen;Milind Pandit;Guillermo Sobreviela;Dingbang Xiao;Ming Zhuo;Dustin D. Gerrard;Ryan Kwon;Gabrielle Vukasin;Thomas W. Kenny;Ashwin Seshia

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2020 | Conference Paper |

Thermal Stability of DETF MEMS Resonators: Numerical Modelling and Experimental Validation

Valentina Zega;Andrea Opreni;Giorgio Mussi;Hyun-Keun Kwon;Gabrielle Vukasin;Gabriele Gattere;Giacomo Langfelder;Attilio Frangi;Thomas W. Kenny

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2020 | Conference Paper |

Cited by: Papers (8)

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The design, fabrication and experimental validation of two MicroElectroMechanical Systems (MEMS) Double-Ended Tuning-Fork (DETF) resonators that exhibit an intrinsic sub-350 ppm thermal stability in the temperature range [5°C-85°C] are reported. A strategy for the optimization of the design of MEMS resonators that exhibit high thermal stability and high quality factor is also provided and a good a...Show More

Thermal Stability of DETF MEMS Resonators: Numerical Modelling and Experimental Validation

Valentina Zega;Andrea Opreni;Giorgio Mussi;Hyun-Keun Kwon;Gabrielle Vukasin;Gabriele Gattere;Giacomo Langfelder;Attilio Frangi;Thomas W. Kenny

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2020 | Conference Paper |

An Epi-Seal Encapsulated Franklin Oscillator Sustaining More Than 200,000,000 Electric Switching Cycles

Danny A. Kassie;Ian B. Flader;Shai Shmulevich;Hyun-Keun Kwon;Thomas W. Kenny;David Elata

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2020 | Conference Paper |

Cited by: Papers (1)

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For the first time ever, we demonstrate an Epi-Seal encapsulated, self-excited Franklin oscillator. This electromechanical switch oscillator, is driven by a constant input of 3.8 [V], sustains self-oscillations at a frequency of 88.6 [kHz], and requires a power of only 1.5 [μWRMS]. We demonstrate over 200 million switching cycles, with two events of contact/charge transfer in each cycle. We demons...Show More

An Epi-Seal Encapsulated Franklin Oscillator Sustaining More Than 200,000,000 Electric Switching Cycles

Danny A. Kassie;Ian B. Flader;Shai Shmulevich;Hyun-Keun Kwon;Thomas W. Kenny;David Elata

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2020 | Conference Paper |

Low-Power Dual Mode MEMS Resonators With PPB Stability Over Temperature

Lizmarie Comenencia Ortiz;Hyun-Keun Kwon;Janna Rodriguez;Yunhan Chen;Gabrielle D. Vukasin;David B. Heinz;Dongsuk D. Shin;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 2 | Journal Article |

Cited by: Papers (28)

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We demonstrate two novel dual-mode ovenized MEMS resonators, each with an in-chip device layer micro-oven that utilizes less than 30mW for resonator temperature control over variations in external temperature from -40°C to +60°C. The device layer micro-oven enables correction for ambient temperature variations and achieves a 1-week frequency stability for the output mode over temperature near 1.5 ...Show More

Low-Power Dual Mode MEMS Resonators With PPB Stability Over Temperature

Lizmarie Comenencia Ortiz;Hyun-Keun Kwon;Janna Rodriguez;Yunhan Chen;Gabrielle D. Vukasin;David B. Heinz;Dongsuk D. Shin;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2020 | Volume: 29, Issue: 2 | Journal Article |

A Dual-Axis Resonant Accelerometer Based on Electrostatic Stiffness Modulation in Epi-Seal Process

Seungyong Shin;Haoran Wen;Hyun-Keun Kwon;Gabrielle D. Vukasin;Thomas W. Kenny;Farrokh Ayazi

2019 IEEE SENSORS

Year: 2019 | Conference Paper |

Cited by: Papers (7)

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We report on the implementation of a novel vacuum-encapsulated dual-axis resonant accelerometer utilizing electrostatic stiffness modulation. Novel flexure designs are used to enable fully-decoupled in-plane dual-axis translational motions of the proof-mass to achieve low cross-axis sensitivity with the translational mode frequencies above 20 kHz for high bandwidth applications. Differential frequ...Show More

A Dual-Axis Resonant Accelerometer Based on Electrostatic Stiffness Modulation in Epi-Seal Process

Seungyong Shin;Haoran Wen;Hyun-Keun Kwon;Gabrielle D. Vukasin;Thomas W. Kenny;Farrokh Ayazi

2019 IEEE SENSORS

Year: 2019 | Conference Paper |

Thermomechanical-Noise-Limited Capacitive Transduction of Encapsulated MEM Resonators

James M. L. Miller;Nicholas E. Bousse;David B. Heinz;Hyo Jin K. Kim;Hyun-Keun Kwon;Gabrielle D. Vukasin;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2019 | Volume: 28, Issue: 6 | Journal Article |

Cited by: Papers (21)

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The thermomechanical motion imposes the fundamental noise limit in room-temperature resonant sensors and oscillators. Due to the inherently low sensitivity of capacitive transduction in microelectromechanical (MEM) resonators, its effects are often masked by noise in the subsequent amplifier and measurement stages. In this work, we demonstrate a capacitive transduction scheme for measuring kHz-MHz...Show More

Thermomechanical-Noise-Limited Capacitive Transduction of Encapsulated MEM Resonators

James M. L. Miller;Nicholas E. Bousse;David B. Heinz;Hyo Jin K. Kim;Hyun-Keun Kwon;Gabrielle D. Vukasin;Thomas W. Kenny

Journal of Microelectromechanical Systems

Year: 2019 | Volume: 28, Issue: 6 | Journal Article |

Nonlinearity of Degenerately Doped Flexural Mode Silicon Micromechanical Resonators

Saisneha Koppaka;Anne L. Alter;Gabrielle D. Vukasin;Dongsuk D. Shin;Ian B. Flader;Yunhan Chen;Thomas W. Kenny

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

Year: 2019 | Conference Paper |

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In this paper, we present an experimental study of nonlinearities in degenerately doped flexural-mode silicon MEMS resonators. Two geometries (single and double-anchored) and two wafer orientations ( and ) are used to analyze the elastic effects of p-type (1.31 × 1016 to 1.61 × 1015 cm-3) and n-type (1.264 × 1015 to 2.64 × 1014 cm-3) degenerately doped double-ended tuning forks. We emp...Show More

Nonlinearity of Degenerately Doped Flexural Mode Silicon Micromechanical Resonators

Saisneha Koppaka;Anne L. Alter;Gabrielle D. Vukasin;Dongsuk D. Shin;Ian B. Flader;Yunhan Chen;Thomas W. Kenny

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

Year: 2019 | Conference Paper |

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