Author details
C. D. Marsh
Also published under: C. Marsh
Affiliation
Department of Materials
University of Oxford
Oxford, UK
Biography
Chris D. Marsh received the B.Sc. degree in applied physics and electronics from the University of Lancaster, Lancaster, U.K., in 1983, and the D.Phil. degree in materials science from the University of Oxford, Oxford, U.K., in 1993.,In 1990, he became a Research Fellow in the Materials Department, University of Oxford. Prior to this, he was a Visiting Researcher at Hitachi's Central Research Laboratory, Japan. His research interests are in the microstructure of silicon-based materials for applications in microelectronics, in particular, the relationship between the microstructure, processing methods and electrical properties, and the application of transmission electron microscopy techniques to the study of the microstructure. He has autho... Author's Published Works
