Recently CNN is not only widely used in the field of image recognition but also used in various fields such as classifying vibration data. Therefore, increasing the performance of CNN models is becoming more important. One of the various methods to improve the performance of CNN models is to optimize hyper-parameters. This paper presents a method for optimizing the hyper-parameters of CNN models t...Show More
In this paper, the predictive maintenance(PdM) technology was applied to the semiconductor manufacturing equipment and the DBSCAN algorithm parameters were optimized. The data obtained from the semiconductor equipment was obtained using acceleration sensors and was used to determine the conditions of the equipment. To simulate the malfunction condition of the equipment, the virtual error data was ...Show More
Semiconductor equipment is closely related to production yield and should be periodically inspected to maintain the performance. However, traditional equipment maintenance methods have difficulty responding to sudden failures and economic losses due to unpredicted situation. Recently, predictive maintenance technologies have been actively studied, with many advantages, such as the ability to predi...Show More
