Modeling Linear Sliding Electrostatic Motors With Skewing

Linear sliding electrostatic motors operate based on the Coulomb force between charges in repeatedly patterned electrodes in a slider and stator configuration. We present a model for linear electrostatic motors derived from the assumptions of the electric fields that formally provide the physical relationship between the motor design and the capacitance matrix. The cross-sectional actuation force is obtained with the capacitance matrix and explored for various motor parameters. We also extend the model for generic skewing patterns, five of which are shown representatively with their influences on the actuation force. The experimental results validate the derived capacitance matrix, the model for skewing patterns, and the resultant model of the actuation force. Overall, our model provides an insight into the effects of the parameters involved in the derivation of the actuation force.