Simulation of Multiple Interdigitated Electrode Shapes for Sensor Application

In this paper, the performance of the interdigitated sensor is analyzed by using multiple electrode shapes. The performance of each of the electrode’s design is compared for gap between 0.25mm, 0.5mm and 1.0mm. The effect of backplate at the bottom of the sample also will be compared since it improves the fringing effect field of the sensor and increases sensitivity. The interdigitated electrode arrangement and simulation were created using Finite Element Method Magnetics (FEMM) software. While running the simulation, FR-4 material was used as the substrate. The tabular data used in this research will show all of the capacitance values together with different parameters to examine their performance. The result shows square-shaped electrode design has higher capacitance value.