PIGsolver software for simulation RF plasma flow at intermediate pressure

The PIGsolver software for simulation RF plasma with gas flow for the Knudsen numbers 0.008–0.07 for the carrier gas for processes in a intermediate pressure has been developed. It is based on constructed model for intermediate pressure RF plasma flow. The C++ solver (PIGsolver) uses the OpenFOAM package libraries (DSMC and FVM). The simulation model includes an initial boundary value problem for the kinetic Boltzmann equation describing the distribution function of the carrier neutral gas, boundary value problems for the continuity equation of the electronic, ionic and metastable components, the electron energy conservation equations, for Maxwell’s RF equations in the form of telegraphic equations and the Poisson equation for the potential part of field. The results of the calculation of the electric intensity, the concentration of electrons, iones and metastables, the potential component of the electromagnetic field in a cylindrical vacuum chamber are obtained. This paper highlights constructed solver, calculations algorithm and part of simulations of the electrodynamics of processes in a jet RF discharge of intermediate pressure depending on the potential on the sample.