Vacuum Flat-Panel Solar Blind Ultraviolet Detectors Using PIN-Structure Photocathodes Formed by ZnO Nanowires on NiO-Ga2O3

A vacuum cold cathode detector formed by a PIN-structure photocathode and a ZnS thin film is proposed to achieve highly sensitive solar blind ultraviolet detection. The PIN-structure photocathode was formed by ZnO nanowires grown on NiO-Ga
2
O
3
heterojunction using a thermal oxidation technique. The electrons generated by internal photoelectric effect in PIN photocathode are accelerated in the vacuum gap and multiplied in the ZnS thin film by EBIPC effect, achieving a high ultraviolet detection responsivity.