Mechanical Quality Factor Evaluation of Polymer Materials using PZT/Polymer Integrated Piezoelectric Actuator

This study presents the first experimental estimation of the mechanical quality factor (Q
m
) of polymer thin films, introducing a novel and standardized methodology for its evaluation. Leveraging a PZT/polymer composite MEMS actuator, we have quantitatively dissected the energy dissipation mechanisms of cantilevers vibrating in vacuum environments. Through a combination of simulations and measurements, we validated the Q
m
values for two polymer types, TMMR-NA1000 and SU8, with results demonstrating Q
m
values of 14-18 for TMMR-NA1000 and 13-20 for SU8, respectively. These materials showcased superior damping characteristics, affirming their potential in enhancing THD performance. The evaluation method for Q
m
detailed in this work is not only straightforward and easy to implement but also boasts universal applicability, making it a promising tool for the assessment of diverse materials. Looking ahead, employing this methodology to ascertain the intrinsic damping properties of polymer materials holds significant promise for forecasting the performance of polymer-integrated devices. This is particularly relevant for the performance enhancement of PZT-MEMS speakers.