The Suppression of Transverse Modes in POI SAW Resonator with Groove Configuration

The groove configuration was adopted to offer better energy confinement and further suppress transverse modes by reducing the velocity at IDTs end in POI SAW devices, which was achieved by modulating the dimension of the grooves. The simulated results shows that this configuration can effectively suppress transverse modes and measured results of 50°LT/SiO
2
/Si SAW resonator with proposed structure were provided for validation in the POI structure.