A Quality Factor Matching Method for MEMS Disk Resonator Gyroscope in Rate Mode

This paper introduces a method for matching the quality factor of Micro-Electro-Mechanical Systems (MEMS) disk resonator gyroscopes (DRGs) operating in rate mode. In contrast to existing approaches for quality factor matching, we have innovatively delved into obtaining the quality factor. By taking into account the unique mode characteristics of MEMS DRGs in rate mode, we have devised algebraic calculation circuits to directly capture real-time quality factor values during operation. Furthermore, through the utilization of the electric damping, we have designed quality factor matching electrodes and constructed the resistive damper, facilitating quality factor matching of the MEMS DRG. Experimental findings demonstrate that, compared to traditional offline quality factor testing methods, the online quality factor testing method proposed in this paper achieves a relative measurement error of less than 4.14%. The quality factor mismatching has been reduced by 94%. Additionally, the zero-rate output (ZRO) of the MEMS DRG resulting from quality factor mismatching has decreased from 0.1287 °/s to 0.0212 °/s.