A 1.5 V 132 dBSPL AOP Digital Readout Circuit for MEMS Microphone Using Self-Adaption Loop

This work presents a digital readout integrate circuit (IC) for capacitive MEMS microphone, which features a self-adaption loop (SAL), allowing the single-ended system to process high sound pressure signals. A prototype is realized in a 0.153 μm CMOS process, performing 67.34 dB-A SNR at 94 dB Sound-Pressure-Level (SPL) with an acoustic overload point (AOP) of 132 dB SPL, consuming 738 μA at 1.5 V supply voltage.