Numerical study on the effect of electric field distribution on plasma discharge in ferromagnetic-enhanced inductively coupled plasma

This article reports the study of a new structure of ferromagnetic core enhanced inductively coupled plasma (FMICP) source. A 3D drift diffusion fluid model for plasma, a 3D quasi-static magnetic field model that calculates the magnetic vector potential in the frequency domain for electromagnetic field and a simplified B-H curve model with frequency domain average energy method were used. The difference in the induced electric field distribution inside the discharge tube between FMICP and cylindrical coil ICP was compared. The results show that the induced electric field intensity in the discharge area of the FMICP is much greater than that of the cylindrical coil ICP, and the distribution is uniform, which can generate plasma throughout the entire cavity area of the tube. FMICP has a higher utilization rate of space than conventional ICP.