Removal and Surface Effects of Atmospheric Pressure Plasma Jet on Organic Pollutants in Gratings

Atmospheric pressure plasma jet can generate highly-actived and low-temperature plasma in open space, which can reduce thermal effects while increasing the range of action. It has important application value for in-situ removal of organic pollutants on the surface of diffraction gratings in high-energy laser devices. This study designed orthogonal experiments, using the contact angle and surface energy of the grating surface as evaluation criteria, and observed the changes in the grating surface morphology to study the cleaning effect under different parameters, revealing the degree of influence of different cleaning parameters. Afterwards, a mathematical regression model between cleaning parameters and cleaning effect was established to verify the significance of different parameters. The research results indicate that plasma jet can effectively remove organic pollutants. As the cleaning distance decreases and the cleaning time and oxygen ratio increase, the cleaning effect becomes better. And through range analysis, the degree of influence of different cleaning parameters was obtained. The mathematical regression model provides a theoretical basis for predicting the cleaning effect. The research results can provide a new method for online removal of organic pollution on the surface of gratings in high-energy laser devices.