Silicon Device-based Electronic Biosensors for Sustainability and Healthcare

Miniaturized portable biosensors hold significant potential for advancing sustainability and healthcare, particularly management of infectious and chronic diseases. This paper focuses on manufacturable silicon-based biosensing devices capable of detecting various analytes, including ions, proteins, and viruses, in aqueous media. Two types of electronic sensing devices are reviewed. Firstly, results for recently proposed bipolar junction (BJT) biosensors are presented. These BJT biosensor demonstrate superior sensing characteristics that are particularly well suited for applications requiring continuous monitoring with minimal human intervention. Additionally, nanoscale HfO
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finFET biosensors designed for early diagnostics are discussed; the finFET sensors research has been licensed for commercialization rights and technology transferred to a CMOS foundry.