Experimental Study of Periodically Poled Piezoelectric Film Lithium Niobate Resonator at Cryogenic Temperatures

This work reports the first study of periodically poled piezoelectric film (P3F) lithium niobate (LiNbO
3
) resonators at cryogenic temperatures. We experimentally investigate the temperature dependency of resonant frequencies and quality factor
$(Q)$
of higher-order Lamb modes up to 20 GHz between 80°K and 297°K, using a tri-layer P3F LiNbO
3
resonators as the experimental platform. The supported thickness-shear Lamb modes between second-order symmetric (S2) and eleventh-order antisymmetric (All) modes show temperature coefficients of frequency (TCF) averaging −68.8 ppm/K. Higher
$Q$
and more pronounced spurious modes are observed at lower temperatures for many modes. Upon further study, the cryogenic study will be crucial for identifying dominant loss mechanisms and origins of spurious modes in higher-order Lamb wave devices for millimeter-wave applications.