A Fault-Detection Method of MEMS Micromirrors with Hysteresis *

Electromagnetic scanning micromirror (EMSM) is a micro-electro -mechanical system (MEMS) chip used as an actuator in precision instruments. In this paper, the failure modes of the EMSM are briefly investigated. In order to suppress the effect of random noise and non-smooth hysteresis, a non-smooth dynamic state estimator (NSDSE) is proposed to estimate the states of the EMSM chip. Then, the stability of the NSDSE system is studied. Afterward, the fault detection method using the proposed NSDSE are presented. Finally, the experimental results are presented for validating the proposed fault detection method.