2-Axis Planar Hall Magnetic Field Sensors with Sub NanoTesla Resolution

Magnetic sensors based on the planar Hall effect (PHE) are attractive for applications where sub nano-Tesla field resolution is required. Here we present detailed noise study of PHE sensors made of two crossing masnetic ellipses that measure two axes of the magnetic field in the sensor plane with equivalent magnetic noise level better than 350
$\text{pT} / \sqrt{}\text{Hz}$
at 10 Hz in exactly the same region while keeping the size and noise level of a single axis sensor.