The Historical Development Of Non-Planar Devices

The history of the evolution of non-planar devices leading to the practical use of 3-dimensional device structures, which gave rise to the major change in the MOSFET structure from planar to today's FinFETs, is reviewed. FinFETs were created by combining research on the operating mechanisms of double-gate FET devices with research on non-planar device structures. The history of research in each field up to the beginning of FinFETs was traced using the naming of FET devices as a clue.