Development of coaxial-type inductance standard for megahertz-to-gigahertz frequency range

We have been developing a coaxial-type inductance standard (CTIS) that can be used as a standard for the inductance measurement in the megahertz-to-gigahertz frequency range. The CTIS will enable accurate and reliable measurement of inductors used in the 5th generation mobile communication systems. This paper describes the structure of the CTIS, and the dimension evaluation of CTIS according to national metrology standards. The inductance component determined from the dimensions of the fabricated CTIS was calculated from the dimension evaluation results and estimated to be 10.000 nH. The expanded uncertainty of the inductance estimation was estimated to be 0.028 nH.