Development of the Space Charge Measurement System for High Temperature using MEMS-PZT

Space charge has been measured by the pulsed electro acoustic (PEA) method to evaluate the performance of insulating materials. Recently, there has been a demand to evaluate the performance of insulating materials on high temperature environments [1] [2] [3]. However, P(VDF-TrFE), which is commonly used in conventional space charge distribution measurement device as a sensor, has a Curie temperature of $120 ^{\circ}\text{C}$, so it is difficult to perform measurements at high temperature. Therefore, we are developing a piezoelectric sensor using Lead Zirconate titanate (PZT), which has high heat resistance. In this paper, we made a piezoelectric sensor using MEMS-PZT, and investigated the piezoelectric property and thermal resistance.