Hydrogen sensor module based on MEMS technology

Hydrogen is used nowadays in many industrial applications all over the world because of its flexibility and efficiency. Hydrogen fuel represents a clean energy source and can be the most suitable alternative for gasoline and natural gas since when it burns, there are no emissions besides water vapor. Nowadays, the demand for hydrogen sensors is continuously increasing, especially in fields such as fuel cell electric vehicles or electric transformers. Hydrogen has been currently acknowledged as an element of energy storage, having the capability of reducing several obstacles encountered in fossil fuels, like air pollution, global warming, etc. These requirements claim to develop a new sensor technology that presents requirements that can be easily integrated into multiple industrial applications. The introduction of highly sensitive hydrogen sensors as a consumer fuel has caused huge concerns over its safety, corresponding to increased interest in hydrogen sensors and leak detection. This paper aims to describe the concept of a hydrogen sensor with a micro-heater that is fabricated using MEMS technology for a hydrogen-based society. The main features of the hydrogen sensor include a micro-heater, thermal isolation, and a temperature sensor which will be realized in a reliable and cost-effective way to achieve high-yield rate and low-power consumption.