Resonant cavities based on substrateless dielectric waveguide platform for terahertz integrated systems

In the past two decades, terahertz technology has been steadily improved with a wide range of scientific studies to develop terahertz applications. Recently, a substrateless dielec-tric waveguide platform based on effective medium has been proposed. Waveguiding on this silicon-based platform can be realized with low loss and low dispersion. One important series of components for this platform includes resonant cavities of different characteristics that are crucial for terahertz integrated systems. In this article, we present one design of a disk resonator, and one design of a photonic crystal cavity based on this sub-strateless dielectric waveguide platform. These cavities operate within the frequency range of 220–330 GHz. The simulation and measurement results of these resonant cavities show a strong resonant behavior, with a resonance Q-factor that can be tuned. These cavities can be employed in various terahertz applications including sensing, switching, and modulation.