Double Slot Micro Ring Resonators with Inner Wall Angular Gratings as Ultra Highly Sensitive Biochemical Sensors

An ultra-compact double slot micro ring resonator with inner wall angular gratings is simulated and fabricated. This structure boosts the sensitivity to 749.033 nm/RIU with a Limit of Detection value of $8.010\times10^{-5}$ RIU and a large measurement range of 72.62 nm.