I. Introduction
The informatization of the new power system relies on varieties of advanced sensor networks [1]. Electric field sensing devices can be used for the measurement of voltage and electric field in the power grid, which has great application value. However, traditional electric field measurement methods always have disadvantages of large size, high cost, narrow frequency bandwidth and narrow measurement range. Micro electric field sensors are a kind of low-cost, small-size electric field measurement device based on micromachining technology. Due to its high performance, ease of mass production, and ease of integration, micro electric field sensors have been widely studied currently.