Dual-Axis MEMS Micro-Mirror Based On Lithium Niobate Thin-Film

This work presents a novel piezoelectric actuated dual-axis micro-mirror using the Lithium Niobate (LiNbO
3
) thin-film on insulator (LNOI) platform. The performances of the proposed MEMS mirror are analyzed by the COMSOL 3D FEM simulation. Thanks to the strong e
31
and e
33
of LiNbO
3
thin film in specific orientations, which contribute to high effective piezoelectric constants e
31
,.f, the proposed dual-axis micro-mirror demonstrate high optical deflection angles in both of scanning modes. The design with LN ß = 123° demonstrates a high deflection of 23.5° for fast scan, which is 14.7× of AIN and 5.3× of Al
0.7
Sc
0.3
N. The simulation results show that the mirror based on LNOI comprehensively surpasses the design with aluminum nitride (AIN) or Sc-doped aluminum nitride (Al
1-x
Sc
x
N). This work demonstrates that LNOI is a promising platform for piezoelectric dual-axis MEMS mirrors.