Vibration Mode Tuning of Acoustic Pillar Array Chip for Precise Microscale Manipulations

This paper verifies that the micro pillar array chip can perform parallel and diverse trapping of particles with theoretical simulation and experiments. Under the excitation of sound source, the vibration of micropillar array excites the local acoustic field, wherein the acoustic streaming and acoustic radiation forces are generated. Micro/nanoscale particles can be effectively trapped under the combined action of these two nonlinear effects. By tuning the vibration mode of the micro pillar, different acoustic streaming modes can be achieved, leading to tunable modes of vortices and particle trapping. It is worth noting that the micro pillar array chip has low working frequency (164 kHz) and simple manufacturing process, which is of great significance to the biomedical applications.