IBAD c-axis parallel ZnO piezoelectric film stack for gyroscope applications

We proposed a novel gyroscope sensor based on the transmission-and-detection type gyroscope sensor with the acoustic delay line. The c-axis parallel ZnO films are suitable as piezoelectric layer to detect the pure shear wave. In this study, the c-axis parallel ZnO thin films by using the ion beam assisted RF magnetron sputtering. c-Axis in-plane direction of the top layer and bottom layer were successfully controlled to be vertical by using ion beam direction in order to fabricate the transmission-and-detection type gyroscope sensors. The transducer comprised of the c-axis parallel ZnO thin film shows a shear mode electromechanical coupling coefficient k15
²
of 2.0%. Importantly, the pure shear wave excitation was observed in our gyroscope sensor.