Design of Magnetic Hall Sensor for Current Sensing in a Standard CMOS Process

This paper presents a magnetic Hall sensor for current sensing in a standard CMOS process, which that does not include any special fabrication process steps for the sensor implementation. Based on the measurement results for a previously fabricated sensor device, we employ a square-shaped Hall plate as a sensor device and design a novel bridge instrumentation amplifier with chopping and auto-zero functions. The prototype of the sensor is implemented in a standard 180 nm CMOS process with a die area of
$450\mu m\times 450\mu m$
.