Analysis of Piezoelectric Based MEMS Micromirror for Optical Communication

An MEMS device known as a micromirror may be employed in a wide range of industries and applications. The development of scanning micro mirrors for optical switching applications has received significant attention. Micromirrors that are powered by piezoelectric actuators may produce substantial deflections in all directions, as shown in this research. COMSOL Multiphysics simulation tool is being used to investigate the electrical and mechanical characteristics of the mirror system under test. Because silicon is used to build micromirrors, they have a high refraction rate. PZT is the primary component of a piezoelectric actuator (PZT). Piezoelectric properties of the actuator beam result in bending in both angular and vertical directions, which may be employed for tip, tilt motion when the voltage is supplied. Input voltage of 10 V results in an average of 1.78 μm deflection in either direction. Optical switching may benefit from the micromirror’s capacity to deflect in space under control.