Effects of Operating Parameters in Vibration Assisted Tip-based Nanofabrication for Machining 2D/3D Nanostructures

The influence of operating parameters on the machining performance in vibration-assisted tip-based nano-fabrication (VTBN) for 2D/3D nanostructures was studied in this paper. Taking 3D nanochannels as the machining targets, machining depth and surface roughness as the machining objectives, a series of machining experiments were designed with the general factorial method. According to the results, three parameters are all significant factors of the responses. Vibration frequency has the most significant effect. The amplitude has a linear relationship with two responses. High vibration lead to lower surface quality of the nanostructures.