Nanostructure Characterization and Film Thickness Measurements at the Fabrication Line

Roll-to-roll embossing is a fast and inexpensive method for producing nanotextured polymer foils in high volumes. We present results from an optical scatterometric method for characterizing the dimensions of roll-to-roll embossed periodic nanogratings, which display optical color effects. This method enables in-line, non-destructive quality control during fabrication. Feature heights are extracted with nm resolution for sinusoidal and square type gratings. Further, it is shown that film thicknesses can be determined by analyzing the spectral interference pattern observed in thin polymer films.