Design of a Thermal Microsensor for Air Flow Ratewith Low Power Consumption and High Sensitivity

An air flow rate sensor based on the calorimetric principle is designed. A 3D finite element analysis model of the flow sensor is presented, using COMSOL Multiphysics software. The Nguyen model is used to compare with the sensor simulations. Borosilicate glass substrate, titanium as heater and boron-doped silicon carbide as temperature sensors are considered. The designed device is studied on the range of 0 ml/min to 19.2 ml/min, and results show 2.24 mW of power consumption in the heater and a sensitivity of 70 mV/(m/s)/mW.