Signal-Transformation-Based Tracking Control of Nano-positioning Stage with Kalman Filter

This paper presents a novel dual-loop control scheme for the piezo-actuated nano-positioning stage to alleviate the influence of measurement noise in tracking control. In this scheme, a Kalman filter is employed to estimate optimal system states in the inner loop. Estimated system states are used for feedback damping controller design via a pole-placement method to suppress resonance. In the outer loop, a signal transformation approach is utilized along with a double integral controller to address projected noise as well as to eliminate tracking errors. Comparative tests are run on a self-designed piezo-actuated nano-positioning stage to substantiate the efficacy and superiority of the proposed method for high-precision tracking of triangular references.