Terahertz Planar Goubau Line Components on Thin Suspended Silicon Substrate

The planar Goubau line is a low-loss planar single-conductor waveguide that holds promise for terahertz applications, where power efficiency is crucial. We present three circuit elements for planar Goubau line: a stopband filter, a matching load, and a power divider, which have been fabricated in a high-resistivity silicon membrane. Simulation results are presented for the matching load and the power divider. The filter’s performance is validated by comparing measurement results with simulations, showing good agreement.