Measurement of Current Waveform Due to Different Load of ESD Gun, TLP-HMM, and CR-HMM

The discharge current waveform of ESD gun, TLP- HMM (Transmission line pulse - human metal model), and CR- HMM (Capacitance resistance - human metal model) is calibrated with a $2 \Omega$ load impedance. However, the load impedance structure of TLP- and CR-HMM is different from that of ESD gun. In this study, to investigate their influences, we measured their discharge current waveforms for two types of load impedances, $2 \Omega$ and $2 \Omega$, with the same load impedance structure as that of the ESD gun. The results show that not only the load impedance value but also the load impedance structure affects the discharge current waveform.