330-500 GHz Waveguide-feed Tapered Slot Antenna on Micro-machined Silicon Substrate

A corrugated Fermi tapered slot antenna (TSA) working at WR2.2 (330-500 GHz) is proposed in this paper. The proposed TSA adopts Fermi-structure tapering and corrugated edges to reduce the side lobes and improve the radiation patterns. It is fed by a microstrip line using a Marchand balun, and an E-plane probe is used as the power transfer between antenna chip and waveguide. The antenna is fabricated using SOI wafers with 15um thickness high-resistivity Silicon, and the partial substrate is etched to reduce the surface wave effect. The proposed antenna has -10 dB measured bandwidth at 330-500 GHz and 5-9.31 dBi measured gain. In addition, the simulated and measured E-plane and H-plane radiation patterns at 350 and 450 GHz are shown, of which the main lobe radiation patterns fit the simulation.