Simulation and investigation of dual axis MEMS scanning mirror for LiDAR applications

The MEMS design has a lot of potential for future advancements. Size and cost minimization are the primary goals of MEMS. It is used in biomedical imaging, microscopy, and LiDAR for unmanned vehicles employing mirrors and suitable actuator systems. This research work presence a low-voltage powered scanning mirror for LiDAR applications, particularly for UAVs (Unmanned Aerial Vehicles), and gesture recognition. A leverage structure with appropriate materials such as PZT (Lead zirconate titanate) ceramics is used to create a scanning mirror with a good FOV (Field Of View) and low power consumption. In a MEMS-based mirror, proper acting mechanisms are used to provide a high FOV and two-axis scanning. To model the performance of proposed system, the COMSOL Multiphysics software is used to run finite element simulations. The mirror may be observed by moving up to 180 µm in either direction along the z- or y- axis. For an input voltage of only 5 V, the aforementioned displacement is obtained.