Air Damping Effects on Perforated RF MEMS Switches

RF MEMS Switch with a Fixed-Fixed membrane structure is designed for testing the dampening impact of squeezing films. A shunt-type MEMS switch is the other name for fixed beam switch. A RF MEMS switch squeeze film damping is examined in this study for fixed-fixed beam. On the beam membrane which touches the substrate when voltage is applied, air damping analysis is performed for a variety of membrane designs with different sizes of etch holes. It was determined that a membrane with a 60-micron-long slit was better at simulating the distribution of pressure and damping force on the membrane. The obtained pressure distribution on the squeezes film reduces the closing times of the RF-MEMS switches. Damping force is explored for a range of ambient pressure settings by examining the influence of hole diameter and square hole length. The damping force varies very little with hole radius and square hole length at low ambient pressures. In COMSOL Multiphysics, damping force and surface pressure are modeled and simulated.