Recent Advances in Ni-based GeSn Metallization

In this paper, we present an overview of results obtained in CEA-Leti on Ni-based GeSn metallization in the last 5 years. In particular, we discuss the solid-state reaction between a Ni thin film and GeSn layers. We then study the behavior of the Sn during the solid-state reaction and its subsequent impact. Finally, we focus on technological levers that can be implemented to enhance the thermal stability of the Ni / GeSn system.