Recent Progress in Graphene Processes for Metallization and RF Applications

Research on graphene processes for the applications to interconnects and electrodes, such as graphene caps, direct deposition of multi-layer graphene, and stable intercalation doping, is steadily progressing. Furthermore, attention will be paid to the application of graphene, which has a high kinetic inductance, to RF devices. Here, I will give an overview of recent research trends toward the practical application of graphene and discuss the issues.