Automatic 4 K Cryogenic Probe Station for DC and Microwave Measurements on 150-mm and 200-mm Wafers

Robust maturation of cryogenic electronics has been limited by the lack of high-throughput measurement capabilities, especially for electronics that operate at 4 K. Automated on-wafer probing to characterize the dc and RF performance of components and complete circuits has been a critical element in the development of room temperature electronics. We report here the development of a fully automated wafer prober that operates with the wafer cooled to a temperature of 4 K and has the ability to null the ambient magnetic field to below 100 nT, which is important for measuring superconducting circuits with the wafer prober.